Petersen Advanced lithography

Petersen Advanced Lithography

Integrated Image System

Developing an Integrated Imaging system has four phases: factory assessment, planning, implementation, and support.

Factory Assessment

When PAL does a factory assessment, we assess the objective tool set and resist processes, lens and illuminator aberrations, device layout potential for doing optical extension using optical proximity correction and phase-shifting masks.


With the results of the factory assessment in hand, PAL constructs an optical extension road map, which describes what can be done using the current tool set, processes, and design layouts, what would be possible with realistic modifications and an update of that tool set, and what will be needed in the foreseeable future.


Road map in hand, PAL works with your team and infrastructure to build a multistage plan that successfully integrates optical enhancement techniques into production.


Through out the process, PAL will provide monthly process reviews and proactive problem solving.  Supplemental R&D services can complement existing resources, helping organizations accelerate their optical extension effort.