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Microlithography
- Field Guide to Optical Lithography by Chris A. Mack
- Principles of Lithography, Second Edition by Harry J. Levinson
- Optical Imaging in Projection Microlithographyby Alfred K. K. Wong
- Handbook of Semiconductor Manufacturing Technology by Yoshio Nishi (Editor) and Robert Doering (Editor)
- Handbook of Microlithography, Micromachining, & Microfabrication : Microlithography by P. Rai-Choudhury (Editor), J. Lin Burn (Introduction)
- Lithography Process Control (Tutorial Texts in Optical Engineering, Vol Tt 28) by Harry J. Levinson
- Microlithography: Science and Technology by James R. Sheats (Editor), Bruce W. Smith (Editor)
- Semiconductor Lithography : Principles, Practices, and Materials (Microdevices : Physics and Fabrication Technologies) by Wayne M. Moreau (out of print)
Optics and Physics
- Practical Electrodynamics by John David Jackson
- Fourier Series and Optical Transform Techniques in Contemporary Optics : An Introduction by Raymond G. Wilson
- Introduction to Fourier Optics by Joseph W. Goodman
- The New Physical Optics Notebook : Tutorials in Fourier Optics by George O. Reynolds, John B. Develis, George B. Parrent, Brian J. Thompson (Editor) (out of print)
- Optical Physics by S.G. Lipson, H. Lipson, D.S. Tannhauser ( paperback edition also available)
- Principles of Optics : Electromagnetic Theory of Propagation, Interference and Diffraction of Light by Max Born, Emil Wolf
- Statistical Optics by Joseph W. Goodman
Mathematics and Statistics
- Standard Mathematical Tables and Formulae (30th Ed) by Daniel Zwillinger (Editor), Chemical Rubber Company
- Understanding the Fft : A Tutorial on the Algorithm & Software for Laymen, Students, Technicians & Working Engineers by Anders E. Zonst
Numerical Analysis
- for Scientists and Engineers by William J. Orvis
- Mastering Matlab 5 : A Comprehensive Tutorial and Reference (Matlab Curriculum Series) by Duane C. Hanselman, Bruce C. Littlefield
- Microsoft Excel 97 Worksheet Function Reference
- Spreadsheet Tools for Engineers : Excel 97 Version (McGraw-Hill's Best--Basic Engineering Series and Tools) by Byron Gottfried
- Optics by Eugene Hecht
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