Simulation Results Library

We've created this library to share simulation data that may be helpful to other lithographers. This material is the result of PAL's independent research.

Collection Description
Multiple Pitch Transmission and Phase Analysis of Strong Phase-Shift Masks This collection consists of over 60 optimized grayscale masks, generated for our 2001 SPIE paper.


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© 2003 Petersen Advanced Lithography, Inc.