 |
 |
 |
 |
 |
 |
 |
We've created this library to share simulation data that may be helpful to other lithographers. This material is the result of PAL's independent research.
| Collection | Description |
| Multiple Pitch Transmission and Phase Analysis of Strong Phase-Shift Masks | This collection consists of over 60 optimized grayscale masks, generated for our 2001 SPIE paper. |
|
