Recommended Microlithography Books


Field Guide to Optical Lithography by Chris A. Mack

Principles of Lithography, Second Edition by Harry J. Levinson

Optical Imaging in Projection Microlithography by Alfred K. K. Wong

Handbook of Semiconductor Manufacturing Technology by Yoshio Nishi (Editor) and Robert Doering (Editor)

Handbook of Microlithography, Micromachining, & Microfabrication : Microlithography by P. Rai-Choudhury (Editor), J. Lin Burn (Introduction)

Lithography Process Control (Tutorial Texts in Optical Engineering, Vol Tt 28) by Harry J. Levinson

Microlithography: Science and Technology by James R. Sheats (Editor), Bruce W. Smith (Editor)

Semiconductor Lithography : Principles, Practices, and Materials (Microdevices : Physics and Fabrication Technologies) by Wayne M. Moreau (out of print)

Optics and Physics

Classical Electrodynamics by John David Jackson

Fourier Series and Optical Transform Techniques in Contemporary Optics : An Introduction by Raymond G. Wilson

Introduction to Fourier Optics by Joseph W. Goodman

The New Physical Optics Notebook : Tutorials in Fourier Optics by George O. Reynolds, John B. Develis, George B. Parrent, Brian J. Thompson (Editor) (out of print)

Optical Physics by S.G. Lipson, H. Lipson, D.S. Tannhauser (paperback edition also available)

Principles of Optics : Electromagnetic Theory of Propagation, Interference and Diffraction of Light by Max Born, Emil Wolf

Statistical Optics by Joseph W. Goodman

Mathematics and Statistics

CRC Standard Mathematical Tables and Formulae (30th Ed) by Daniel Zwillinger (Editor), Chemical Rubber Company

Understanding the Fft : A Tutorial on the Algorithm & Software for Laymen, Students, Technicians & Working Engineers by Anders E. Zonst

Numerical Analysis

Excel for Scientists and Engineers by William J. Orvis

Mastering Matlab 5 : A Comprehensive Tutorial and Reference (Matlab Curriculum Series) by Duane C. Hanselman, Bruce C. Littlefield

Microsoft Excel 97 Worksheet Function Reference

Spreadsheet Tools for Engineers : Excel 97 Version (McGraw-Hill's Best--Basic Engineering Series and Tools) by Byron Gottfried

You may also search Amazon's database of books:

In Association with Amazon.com


© 2003 Petersen Advanced Lithography, Inc.