Multiple Pitch Transmission and Phase Analysis of
Strong Phase-Shifting Masks

About This Collection

This page provides EMF simulation data collected to explore multiple pitch performance at 248 nm wavelength to optimize alternating phase-shift (altPSM) mask phase and transmission for the following masks: geometric (uncorrected), SCAA, asymmetric lateral biased, additive, undercut, dual trench, and dual trench with undercut.

This research, published as SPIE 4346-72, was conducted as follows.

How to Use the Collection

You'll need PROLITH™ to view the grayscale masks.

1. On the Results Table below, click on the Phase/Transmission cell for a mask you'd like to examine. (If you prefer, you can download a .zip file containing all of the masks.)
2. Download the file to your desktop. Note: Some configurations will open the file directly. In this case, use the File>Save As command, and make sure the file extension is unchanged from *.gry.
3. Import or drag the file into PROLITH™.

Results Table

Mask Types

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